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Semiconductor Engineering23h
Differences In The Lithographic Impact Of Particles On The Pellicle Surface Depending On Type Of EUV Mask Pattern
A new technical paper titled “Impact of Sn Particle-Induced Mask Diffraction on EUV Lithography Performance Across Different ...
Semiconductor Engineering23h
Impact Of Cryogenic Temps On The Minimum-Operating Voltage Of 5nm FinFETs-Based SRAM (IIT, UC Berkeley et al)
A new technical paper titled “An Investigation of Minimum Supply Voltage of 5nm SRAM from 300K down to 10K” was published by ...